Fume Extractor - Model FE 1000
Description
- Detection in confined space (CL2, BCL3, NH3) and VOC removal.
- Removes chemical leakage and odor from local area.
- In emergency situations, such as a toxic gas leak, emergency scrubber can be used
for short time.
- Pollution and contaminants, depending on area, can be selectively collected. e.g.
CL2, BCL3, HF, HCL, F2, NH3, H2S, CH3SH, NaOH, CCl4
- Clean Air Recycling Methods
- Only clean air (not dirt or polluted air) passes through the UPLA filter and into
to the room.
- Does not exhaust contaminated air out; maintains the balance of the air in clean
room.
- Using the containment filter, it can be used in any space in the clean room, especially
directly on process equipment.
- Can be installed as either stationary or mobile.
- Compact Design; can be used and moved throughout to clean a room.
- In confined spaces it can be installed as stationary as a stationary purifier.
Inlet Option 1 - Domed
Used for/during: Accumulation at circular domed vacuum pump, gas scrubber CVD, wet
station, chemical part replacement, permeating/dispersive gases and powders.
Inlet Option 2 - Basic
Used for: MOCVD chamber, MO Source powder cleaning.
Specifications
- Power
- Voltage: AC base 208 ~ 220V
- Electricity: 1.25kW (6 ~ 7A)
- Air Volume
- Static Pressure (mmAq): 12~15㎧ pressure / 20000slm
- Filter
- 3 Stage Filter System: collector, Pre, Medium, resin
- Noise (dB): 47 ~ 53
- Dimensions
- 810 X 1200 X 1250 (Flexible Arm weight: 250kg)
- Resin Life timer system
Parts Diagram
Process Flow Diagram
